Beam scanning effect on focused-ion-beam-induced processing

Beam scanning effect on focused-ion-beam-induced processing

Rajput, Nitul S., Singh, Abhishek K., Verma, Harish C.
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Volume:
168
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420150.2012.761994
Date:
August, 2013
File:
PDF, 234 KB
english, 2013
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