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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - RELACS technique for printing sub-100nm trench using KrF lithography
Wei-Hua Sheu,, Yung-Cheng Chang,Year:
2002
Language:
english
DOI:
10.1109/imnc.2002.1178636
File:
PDF, 47 KB
english, 2002