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High energy x-ray diffraction/x-ray fluorescence spectroscopy for high-throughput analysis of composition spread thin films
Gregoire, John M., Dale, Darren, Kazimirov, Alexander, DiSalvo, Francis J., van Dover, R. BruceVolume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3274179
File:
PDF, 996 KB
english, 2009