[IEEE 2011 IEEE International Conference on Automation Science and Engineering (CASE 2011) - Trieste, Italy (2011.08.24-2011.08.27)] 2011 IEEE International Conference on Automation Science and Engineering - Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing
Pampuri, Simone, Schirru, Andrea, Fazio, Giuseppe, De Nicolao, GiuseppeYear:
2011
Language:
english
DOI:
10.1109/case.2011.6042425
File:
PDF, 490 KB
english, 2011