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Threading dislocation evolution in mega-electron-volt phosphorus implanted silicon
Jasper, Craig, Banerjee, Suman K., Hoover, Allen, Jones, Kevin S.Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1351865
File:
PDF, 424 KB
english, 2001