[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Three-dimensional sound intensity measurements using Microflown particle velocity sensors
de Bree, H.-E., Druyvesteyn, W.F., Berenschot, E., Elwenspoek, M.Year:
1999
Language:
english
DOI:
10.1109/memsys.1999.746785
File:
PDF, 708 KB
english, 1999