Reduced phosphorus loss from InP surface during hydrogen...

Applied Physics Letters 1994 Vol. 64; Iss. 13

Reduced phosphorus loss from InP surface during hydrogen plasma treatment

Balasubramanian, Sathya, Kumar, Vikram, Balasubramanian, N.
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Volume:
64
Year:
1994
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.111835
File:
PDF, 608 KB
english, 1994
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