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Simulation of the effect of bulk vacancy diffusion on the shape of sputtered films deposited onto trenches and vias
Winterton, S. S., Smy, T., Dew, S. K., Brett, M. J.Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360708
File:
PDF, 1.31 MB
english, 1995