Simulation of the effect of bulk vacancy diffusion on the...

Simulation of the effect of bulk vacancy diffusion on the shape of sputtered films deposited onto trenches and vias

Winterton, S. S., Smy, T., Dew, S. K., Brett, M. J.
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Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360708
File:
PDF, 1.31 MB
english, 1995
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