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Epifilm thickness measurements using Fourier transform infrared spectroscopy: Effect of refractive index dispersion and refractive index measurement
Zhou, Zhen-Hong, Choi, Byungin, Flik, M. I., Fan, S., Reif, RafaelVolume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357595
File:
PDF, 1.01 MB
english, 1994