DLTS study of oxygen precipitates in silicon annealed at...

DLTS study of oxygen precipitates in silicon annealed at high pressure

I.V. Antonova, A. Misiuk, V.P. Popov, L.I. Fedina, S.S. Shaimeev
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Volume:
225
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0921-4526(96)00264-5
File:
PDF, 468 KB
english, 1996
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