DLTS study of oxygen precipitates in silicon annealed at high pressure
I.V. Antonova, A. Misiuk, V.P. Popov, L.I. Fedina, S.S. ShaimeevVolume:
225
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0921-4526(96)00264-5
File:
PDF, 468 KB
english, 1996