![](/img/cover-not-exists.png)
Co-implantation of Si+N into GaN for n-type doping
Nakano, Yoshitaka, Jimbo, TakashiVolume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1504500
File:
PDF, 449 KB
english, 2002