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Effects of growth interruption and FIB implantation in the UHV total vacuum process for the buried mesoscopic structures
F. Wakaya, T. Matsubara, H. Nakayama, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. GamoVolume:
227
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0921-4526(96)00417-6
File:
PDF, 192 KB
english, 1996