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[IEEE 2006 IEEE International Frequency Control Symposium and Exposition - Miami, FL, USA (2006.06.4-2006.06.7)] 2006 IEEE International Frequency Control Symposium and Exposition - Nonlinear Characterization of Electrostatic MEMS Resonators
Agarwal, Manu, Park, Kwan, Candler, Rob, Kim, Bongsang, Hopcroft, Matthew, Chandorkar, Saurabh, Jha, Chandra, Melamud, Renata, Kenny, Thomas, Murmann, BorisYear:
2006
Language:
english
DOI:
10.1109/freq.2006.275380
File:
PDF, 401 KB
english, 2006