Kinetics of high-temperature thermal decomposition of SiO2...

Kinetics of high-temperature thermal decomposition of SiO2 on Si(100)

Liehr, M.
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Volume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.574564
Date:
July, 1987
File:
PDF, 795 KB
english, 1987
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