[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - PHOMAG: a photolithography machine allocation game
Shi-Chung Chang,, Chung-Yang Liu,, Ming-Der Hu,, Hsin-Yi Wu,, Hsin-Chen Wu,, Cheng-Lin Chao,, Ren-Cheng Chen,Year:
1997
Language:
english
DOI:
10.1109/issm.1997.664607
File:
PDF, 291 KB
english, 1997