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X-ray scattering study of interfacial roughness correlation in Mo/Si multilayers fabricated by ion beam sputtering
Ulyanenkov, A., Matsuo, R., Omote, K., Inaba, K., Harada, J., Ishino, M., Nishii, M., Yoda, O.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.372977
File:
PDF, 754 KB
english, 2000