Influence of temperature on the hydrogenated amorphous carbon films prepared by plasma-enhanced chemical vapor deposition
Wu, Jiung, Cheng, Yi-Lung, Shiau, Ming-KaiVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3497025
File:
PDF, 365 KB
english, 2010