Low temperature pulsed etching of large glass substrates

Dubost, L., Belinger, A., Perrin, J., Boswell, R. W.

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Volume:

Year:

2003

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.1575211

File:

PDF, 363 KB

english, 2003

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