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Low temperature pulsed etching of large glass substrates
Dubost, L., Belinger, A., Perrin, J., Boswell, R. W.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1575211
File:
PDF, 363 KB
english, 2003