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Comparisons of one- and two-dimensional three-moment fluid models for rf glow discharges
Young, Fongray Frank, Wu, Chwan-Hwa ‘‘John’’Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354875
File:
PDF, 1.33 MB
english, 1993