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Thickness dependence of the properties of highly c-axis textured AlN thin films
Martin, F., Muralt, P., Dubois, M.-A., Pezous, A.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1649343
File:
PDF, 342 KB
english, 2004