Modeling of the deposition of stoichiometric Al[sub 2]O[sub 3] using nonarcing direct current magnetron sputtering
Macák, K.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581275
Date:
May, 1998
File:
PDF, 6.11 MB
english, 1998