Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1992 / 11 Vol. 10; Iss. 6
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T-gate, Γ-gate, and air-bridge fabrication for monolithic microwave integrated circuits by mixed ion-beam, high-voltage electron-beam, and optical lithography
Woodham, R. G.Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586337
Date:
November, 1992
File:
PDF, 926 KB
english, 1992