Influence of boron doping and hydrogen dilution on p-type microcrystalline silicon carbide thin films prepared by photochemical vapor deposition
Ghosh, Sukriti, Dasgupta, Arup, Ray, SwatiVolume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360008
File:
PDF, 1.28 MB
english, 1995