Oxidation mechanisms in TiSi2 films on single silicon substrates
Chen, Jiann-Ruey, Houng, Mau-Phon, Hsiung, Shen-Kan, Liu, Yuen-chungVolume:
37
Year:
1980
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.92094
File:
PDF, 484 KB
english, 1980