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[IEEE 2012 IEEE 12th International Conference on Nanotechnology (IEEE-NANO) - Birmingham, United Kingdom (2012.08.20-2012.08.23)] 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) - Nano-scale reactive-ion dry-etching with electron-beam-baked resist
Ohshiro, Takahito, Hotehama, Chie, Matsubara, Kazuki, Konda, Kazumi, Kowada, Hiroe, Murayama, Sanae, Yamada, Rie, Kawase, Tomoyo, Tsutsui, Makusu, Furuhashi, Masayuki, Taniguchi, Masateru, Kawai, TomoYear:
2012
Language:
english
DOI:
10.1109/nano.2012.6322151
File:
PDF, 582 KB
english, 2012