Optimized energy window of He beams for accurate...

Applied Physics Letters 2005 Vol. 86; Iss. 22

Optimized energy window of He beams for accurate determination of depth in channeling Rutherford backscattering spectrometry

Shao, Lin, Wang, Y. Q., Zhang, X., Wetteland, C. J., Nastasi, M., Thompson, P. E., Mayer, J. W.
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Volume:
86
Year:
2005
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1941454
File:
PDF, 320 KB
english, 2005
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