Comprehensive computer model for magnetron sputtering. II....

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 11 Vol. 32; Iss. 6

Comprehensive computer model for magnetron sputtering. II. Charged particle transport

Jimenez, Francisco J., Dew, Steven K., Field, David J.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4894270
Date:
November, 2014
File:
PDF, 4.04 MB
english, 2014
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