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Comprehensive computer model for magnetron sputtering. II. Charged particle transport
Jimenez, Francisco J., Dew, Steven K., Field, David J.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4894270
Date:
November, 2014
File:
PDF, 4.04 MB
english, 2014