[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Use of a new thermal wave technology for ultra-shallow junction implant monitoring
Li Zhou,, Li Chen,, Hovinen, M., Salnick, A., Rendon, M.J., Jinghong Shi,Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/iit.1999.812182
File:
PDF, 305 KB
english, 1998