Improved estimation of embedded InGaAs/GaAs quantum dots...

Improved estimation of embedded InGaAs/GaAs quantum dots locations using a domed-apex nanoprobe

Xu, Lixia, Arai, Yoshio, Araki, Wakako, Ogawa, Takahiro, Ozasa, Kazunari, Maeda, Mizuo, Hara, Masahiko
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3628632
File:
PDF, 1.52 MB
english, 2011
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