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[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2010.06.15-2010.06.17)] 2010 Symposium on VLSI Technology - Ultra-thin-body and BOX (UTBB) fully depleted (FD) device integration for 22nm node and beyond
Liu, Q., Yagishita, A., Loubet, N., Khakifirooz, A., Kulkarni, P., Yamamoto, T., Cheng, K., Fujiwara, M., Cai, J., Dorman, D., Mehta, S., Khare, P., Yako, K., Zhu, Y., Mignot, S., Kanakasabapathy, S.,Year:
2010
Language:
english
DOI:
10.1109/vlsit.2010.5556120
File:
PDF, 364 KB
english, 2010