Structural modification in reactive-ion-etched i-InP and...

Structural modification in reactive-ion-etched i-InP and n+-InP studied by Raman scattering

Maslar, J. E., Bohn, P. W., Ballegeer, D. G., Andideh, E., Adesida, I., Caneau, C., Bhat, R.

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Volume:

Year:

1993

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.353031

File:

PDF, 1.62 MB

english, 1993

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