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Structural modification in reactive-ion-etched i-InP and n+-InP studied by Raman scattering
Maslar, J. E., Bohn, P. W., Ballegeer, D. G., Andideh, E., Adesida, I., Caneau, C., Bhat, R.Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353031
File:
PDF, 1.62 MB
english, 1993