The chemical oxidation of hydrogen-terminated silicon (111)...

The chemical oxidation of hydrogen-terminated silicon (111) surfaces in water studied in situ with Fourier transform infrared spectroscopy

Boonekamp, E. P., Kelly, J. J., van de Ven, J., Sondag, A. H. M.
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Volume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356510
File:
PDF, 950 KB
english, 1994
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