Prediction and Evaluation of Cleanliness Levels Inside a...

IEEE Transactions on Semiconductor Manufacturing 2008 / 05 Vol. 21; Iss. 2

Prediction and Evaluation of Cleanliness Levels Inside a Mini-Environment by Measuring Mean Air-Age and Effective Flow Rate

Noh, Kwang-Chul, Lee, Hyeon-Cheol, Park, Jung-Il, Oh, Myung-Do
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2000271
Date:
May, 2008
File:
PDF, 1.74 MB
english, 2008
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