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Prediction and Evaluation of Cleanliness Levels Inside a Mini-Environment by Measuring Mean Air-Age and Effective Flow Rate
Noh, Kwang-Chul, Lee, Hyeon-Cheol, Park, Jung-Il, Oh, Myung-DoVolume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2000271
Date:
May, 2008
File:
PDF, 1.74 MB
english, 2008