Study on electromagnetron for plasma polymerization. II....

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1994 / 3 Vol. 12; Iss. 2

Study on electromagnetron for plasma polymerization. II. Magnetic field enhanced radio frequency plasma deposition of organogermanium films from tetraethylgermanium

Gazicki, M.
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578878
Date:
March, 1994
File:
PDF, 1.16 MB
english, 1994
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