The impact of frequency mixing on sheath properties: Ion...

Journal of Applied Physics 2005 Vol. 97; Iss. 10

The impact of frequency mixing on sheath properties: Ion energy distribution and V[sub dc]∕V[sub rf] interaction

Shannon, Steven, Hoffman, Daniel, Yang, Jang-Gyoo, Paterson, Alex, Holland, John
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1905798
File:
PDF, 341 KB
english, 2005
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