Stacked polymer patterns imprinted using a soft inkpad

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 4

Stacked polymer patterns imprinted using a soft inkpad

Kong, Y. P., Tan, L., Pang, S. W., Yee, A. F.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1756882
File:
PDF, 675 KB
english, 2004
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