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Experimental Verification of a Design Methodology for Torsion Actuators Based on a Rapid Pull-In Solver
Bochobza-Degani, O., Nemirovsky, Y.Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.824220
Date:
February, 2004
File:
PDF, 626 KB
english, 2004