Abstract: Ion Beam Etching of Surface Gratings

Journal of Vacuum Science and Technology 1973 / 11 Vol. 10; Iss. 6

Abstract: Ion Beam Etching of Surface Gratings

Smith, Henry I., Melngailis, J., Williamson, R. C., Brogan, W. T.
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Volume:
10
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.1318487
Date:
November, 1973
File:
PDF, 339 KB
english, 1973
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