Intrinsic Cu gettering at a thermally grown SiO2/Si...

Journal of Applied Physics 1990 Vol. 68; Iss. 7

Intrinsic Cu gettering at a thermally grown SiO2/Si interface

Bai, P., Yang, G.-R., Lu, T.-M.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346383
File:
PDF, 670 KB
english, 1990
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