Selective ablation of AlN ceramic using femtosecond,...

Journal of Applied Physics 2001 Vol. 89; Iss. 5

Selective ablation of AlN ceramic using femtosecond, nanosecond, and microsecond pulsed laser

Hirayama, Yoichi, Yabe, Hiroyuki, Obara, Minoru
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Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1342805
File:
PDF, 718 KB
english, 2001
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