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Ion beam deposition of tantalum pentoxide thin film at room temperature
Kulisch, W., Gilliland, D., Ceccone, G., Rauscher, H., Sirghi, L., Colpo, P., Rossi, F.Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2832407
File:
PDF, 865 KB
english, 2008