Formation and deterioration mechanisms of low-resistance...

Formation and deterioration mechanisms of low-resistance TaTi ohmic contacts for p-GaN

Suzuki, Masaaki, Arai, T., Kawakami, T., Kobayashi, S., Fujita, S., Koide, Yasuo, Taga, Y., Murakami, Masanori
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371483
File:
PDF, 428 KB
english, 1999
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