X-ray photoelectron spectroscopy studies of thin films of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1985 / 9 Vol. 3; Iss. 5

X-ray photoelectron spectroscopy studies of thin films of TiNx having different annealing histories

Kaufherr, Nurit
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Volume:
3
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.572953
Date:
September, 1985
File:
PDF, 569 KB
english, 1985
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