Calculation of a Al–Ti–O–N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization
Caron, Mario, Gagnon, Gilles, Fortin, Vincent, Currie, John F., Ouellet, Luc, Tremblay, Yves, Biberger, Max, Reynolds, ReeseVolume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.361760
File:
PDF, 304 KB
english, 1996