Nanometer-scale Si selective epitaxial growth on Si surface...

Applied Physics Letters 1998 Vol. 73; Iss. 15

Nanometer-scale Si selective epitaxial growth on Si surface windows in ultrathin oxide films fabricated using scanning tunneling microscopy

Shibata, Motoshi, Nitta, Yoshiki, Fujita, Ken, Ichikawa, Masakazu
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Volume:
73
Year:
1998
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.122415
File:
PDF, 864 KB
english, 1998
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