Gaseous products from the reaction of XeF2 with silicon

Gaseous products from the reaction of XeF2 with silicon

Winters, Harold F., Houle, F. A.
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Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332202
File:
PDF, 747 KB
english, 1983
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