[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Leveraging puma DF wafer inspection to characterize root cause of yield loss on an advanced 32 nm HKMG SOI technology device
Blauberg, Alisa, Stamper, Andrew, Jaeger, Daniel, Brodsky, MaryJane, Mo, Renee, Timberlake, Tom, Sivaraman, Gangadharan, Barnum, Jeff, Crispo, GaryYear:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552816
File:
PDF, 453 KB
english, 2013