Zirconium nitride films deposited in (Ar + N2 + H2) sputtering atmosphere: Optical, structural, and electrical properties
Signore, M. A., Valerini, D., Tapfer, L., Caretto, G., Rizzo, A.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3646147
File:
PDF, 1.12 MB
english, 2011