Dispersion engineering of high-Q silicon microresonators...

Applied Physics Letters 2014 / 07 Vol. 105; Iss. 3

Dispersion engineering of high-Q silicon microresonators via thermal oxidation

Jiang, Wei C., Zhang, Jidong, Usechak, Nicholas G., Lin, Qiang
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Volume:
105
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4890986
Date:
July, 2014
File:
PDF, 1012 KB
english, 2014
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