Polarity effect on the temperature dependence of leakage...

Applied Physics Letters 2002 Vol. 80; Iss. 11

Polarity effect on the temperature dependence of leakage current through HfO[sub 2]/SiO[sub 2] gate dielectric stacks

Xu, Zhen, Houssa, Michel, De Gendt, Stefan, Heyns, Marc
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Volume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1435411
File:
PDF, 310 KB
english, 2002
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